The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 21, 2003
Filed:
Jul. 19, 2001
Takayuki Ishiguro, Tokyo, JP;
Hitachi Electronics Engineering Co., Ltd., Tokyo, JP;
Abstract
A defect detection optical system includes a light receiving system including n light receiving elements arranged in a direction perpendicular to a main scan direction, for focusing an image thereon such that the image becomes in the arranging direction of the light receiving elements, in which, when a width of the image focused thereon in the main scan direction is equal to or smaller than the width of the light receiving elements, light reflected from a recessed or protruded defect is swung in the width direction of the light receiving elements and a light receiving area of the light receiving elements is reduced. When the reflection light from the recessed or protruded defect is; swung in sloped portions of the defect, an amount of light received by the light receiving elements is at least reduced, so that two detection signals having levels lower than those when there is no defect are obtained.