The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 14, 2003
Filed:
Oct. 06, 2000
Hiroyuki Kondo, Kawasaki, JP;
Katsuhiko Murakami, Kawasaki, JP;
Masayuki Shiraishi, Tokyo, JP;
Katsumi Sugisaki, Tokyo, JP;
Nikon Corporation, Tokyo, JP;
Abstract
X-ray-generation devices are disclosed that generate X-rays in a stable manner over extended periods of time. An exemplary device includes an anode electrode and a cathode electrode coaxially arranged, and an insulating member. A nozzle connected to a reservoir of fluid target material directs a flow of fluid target material to the anode electrode. Meanwhile, a pulsed high voltage is applied between the anode electrode and cathode electrode in coordination with the supply of target material. The pulses are timed such that, whenever a unit of target material reaches a tip of the anode electrode, a plasma sheath generated at the surface of the insulating member also reaches the tip of the anode electrode. Hence, the target material is supplied automatically as required to produce X-rays continuously over an extended time period. Intense X-ray fluxes can be produced in a stable manner by monitoring the rate at which target material is supplied to the plasma, relative to the timing of discharge pulses.