The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 07, 2003
Filed:
Sep. 23, 1999
James Horwitz, Fairfax, VA (US);
Douglas B. Chrisey, Bowie, MD (US);
Adriaan Carter, Cabin John, MD (US);
Manfred Kahn, Alexandria, VA (US);
Jeffrey M. Pond, Woodbridge, VA (US);
Steven W. Kirchoefer, Bowie, MD (US);
Wontae Chang, Reston, VA (US);
The United States of America as represented by the Secretary of the Navy, Washington, DC (US);
Abstract
A multicomponent film on a substrate can be annealed at higher temperatures in oxygen by using a specifically designed annealing vessel. The vessel is formed of a multicomponent material which has at least all of the components of the first multicomponent material of the film or, in the case where there are nonvolatile components, then the vessel is formed of a second multicomponent material which has at least the same composition of relatively volatile components as the first multicomponent film. As the multicomponent film is annealed for a sufficient time within the vessel the multicomponent film remains in contact with a vapor of the first multicomponent material and the vessel material. This process called bomb annealing prevents loss of volatile components from the film and roughening of the film surface and leads to films with lower dielectric loss. Preferred thin film materials are ferroelectric materials although any material could be used. The annealing can be done in oxygen at temperatures higher than 900° C.