The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 31, 2002

Filed:

Sep. 29, 1999
Applicant:
Inventors:

Thomas A. Kvanvig, Phoenix, AZ (US);

Martin M. Maxwell, Boise, ID (US);

Tom Birk, Gilbert, AZ (US);

Dave Clay, Phoenix, AZ (US);

Assignee:

Intel Corporation, Santa Clara, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 3/102 ;
U.S. Cl.
CPC ...
G01R 3/102 ;
Abstract

A device is loaded in a test chamber. The device is positioned for support on a chuck in a non-test position in the test chamber. The device is tested in the test chamber. The chuck is positioned in a test position in the test chamber to place the device in electrical contact with a test apparatus. Coolant is delivered to a heat sink supported by the chuck near the device prior to testing the device and while testing the device. Coolant is delivered to the heat sink through flexible tubing coupled to the chuck as the chuck moves from the non-test position to the test position.


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