Electron analyzer having an integrated low pass filter

Abstract

An electron energy analyzer integrated with a low-pass energy filter. The electron energy analyzer includes a separation region disposed inside a coil creating a magnetic field parallel to an axis of the separation region. The magnetic field is terminated at both ends of the separation region and shunted by a magnetic yoke around the outside of the coil. Electrons entering the separation region at a polar angle with respect to the axis accumulate an azimuthal angle dependent on the energy of the electron. Thereby, the direction the electron is traveling when it exits the separation angle depends upon its energy. According to the invention, a low-pass reflector is positioned at the input side of the analyzer, for example, a grounded grid in back of which is positioned a negatively biased absorption electrode. Electrons having energy exceeding the electrode bias are absorbed. Electrons having energy less than the electrode bias are reflected and exit the reflector with the same energy as before. The reflector may be curved to focus the electrons. A curved reflector may be used to introduced chromatic dispersion in the electron beam so that electrons of different energies enter the analyzer at different polar angles. A second reflector may be positioned on the other end of the analyzer so that the energy-analyzed electrons are extracted on the input side of the analyzer.