The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 31, 2002
Filed:
Mar. 01, 2001
Shunji Yamada, Kanagawa, JP;
Sumitomo Heavy Industries, Ltd., Tokyo, JP;
Abstract
A cooling disk unit is used in a wafer chucking device and comprises first and second heat conducting disks one of which is concentrically superposed on the other in a casing. The first heat conducting disk has a first plurality of radial channels while the second heat conducting disk has a second plurality of radial channels. The first radial channels are connected to the second radial channels at either their inside ends or their outside ends so as to flow a cooling fluid from the first (or second) radial channels to the second (or first) radial channels.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile