The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 31, 2002
Filed:
Feb. 18, 1999
Masatoshi Yasutake, Chiba, JP;
Akira Inoue, Chiba, JP;
Akihiko Homma, Chiba, JP;
Ryuichi Matsuzaki, Chiba, JP;
Gerd K. Binnig, Wollerau, CH;
Walter Haeberle, Waedenswil, CH;
Other;
Abstract
A measuring method and apparatus of a scanning probe microscope which is easy to initially set caused by exchanging a cantilever. A cantilever is effected of Z rough movement while forcibly vibrating a sample. When a contact pressure of the cantilever against the sample becomes a predetermined magnitude, the Z rough movement is ended. The forcible vibrational frequency may be a new resonant frequency caused by contacting the cantilever with the sample, or a shift resonant frequency. Then, XY scanning is effected to measure while putting the cantilever into light contact with a sample surface. It is possible to use, as an apparatus to forcibly vibrate the cantilever, a multi-layer piezoelectric element that responds to an output signal from an oscillator for outputting a signal at a predetermined frequency.