The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 24, 2002
Filed:
Apr. 20, 1998
OMM, Inc., San Diego, CA (US);
Abstract
A micromachined plate called a torsion plate, selectively pivots upon a substrate responsively to electrical force so as to move an attached micromirror in a same plane; thereby to accurately selectively intercept, and to reflect, a light beam that is moving parallel to the substrate; forming thus an optomechanical switch The electrical force may be electromagnetic in nature or, preferably, electrostatic. In various embodiments the pivoting torsion plate with the micromirror affixed may be (i) biased off the substrate by a three-dimensional structure and/or by a “reshaped” torsion beam (ii) bent as plate and operated push OR pull, push AND pull, or push AND push, in a rocking operation, (iii) elevated above the substrate upon a self-assembling “micro-elevator structure” and/or (iv) moved greatly in angular position by action of a “micro-flap” A new design spring-loaded landing electrode and a torsion microhinge - further enhance performance. The micromachined, or Micro Electro Mechanical Systems (MEMS), optomechanical switch so formed is both fast and accurate to switch light over large angles up to 180° while being highly resistant to sticking, or “stiction”.