The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 24, 2002
Filed:
Dec. 28, 2000
Applicant:
Inventor:
Michael J. Ries, St. Charles, MO (US);
Assignee:
MEMC Electronic Materials, Inc., St. Peters, MO (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B25B 1/24 ;
U.S. Cl.
CPC ...
B25B 1/24 ;
Abstract
A holder for holding a semiconductor wafer for treatment in wafer treating apparatus including a plurality of supports for generally point support of the wafer at a plurality of points on the wafer. Each support bears a fraction of weight of the wafer and is movable up and down and subject to force biasing it to move upward. The total of the forces exerted on the supports biasing them upward is adapted to counterbalance the weight of the wafer.