The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 17, 2002
Filed:
Jul. 29, 1999
Applicant:
Inventors:
David R. Shafer, Fairfield, CT (US);
Helmut Beierl, Heidenheim, DE;
Gerhard Fürter, Ellwangen, DE;
Karl-Heinz Schuster, Königsbronn, DE;
Wilhelm Ulrich, Aalen, DE;
Assignee:
Carl-Zeiss Stiftung, , DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 1/314 ;
U.S. Cl.
CPC ...
G02B 1/314 ;
Abstract
A projection exposure lens system has an object side catadioptric system, and intermediate image and a refractive lens system. The refractive lens system from its intermediate image side and in the direction of its image plane has a first lens group of positive refractive power, a second lens group of negative refractive power, a third lens group of positive refractive power, a fourth lens group of negative refractive power, and a fifth lens group of positive refractive power.