The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 17, 2002
Filed:
Nov. 28, 2000
Masatoshi Kanamaru, Miho, JP;
Yoshishige Endo, Tsuchiura, JP;
Takanorr Aono, Chiyoda, JP;
Ryuji Kohno, Chiyoda, JP;
Toshio Miyatake, Chiyoda, JP;
Hideyuki Aoki, Takasaki, JP;
Naoto Ban, Sagamihara, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
A structure is provided such that a plural cantilevers are formed on a first board formed of silicon, probes are respectively formed on the individual cantilevers at positions each offset perpendicularly to a longitudinal center line of the cantilever, and wiring connected continuously from each probe to a secondary electrode pad portion through an insulating layer. A structure is alternatively adopted such that by using a both-ends supported beam formed of silicon as the beam, each probe is formed at a position offset toward a supported portion side of the both-ends supported beam.