The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 17, 2002
Filed:
Jun. 19, 2000
Lawrence Chung-Lai Lei, Milpitas, CA (US);
Sal Umotoy, Antioch, CA (US);
Xiaoxiong Yuan, Cupertino, CA (US);
Anzhong Chang, San Jose, CA (US);
Hongbee Teoh, Saratoga, CA (US);
Anh N. Nguyen, Milpitas, CA (US);
Ron Rose, Los Gatos, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A substrate support assembly for supporting a substrate during processing is provided. In one embodiment, a support assembly includes a top ceramic plate having a first side, a bottom ceramic plate having a first side and an embedded electrode, the first side of the bottom plate fused to the first side of the top plate defining a channel therebetween. In another embodiment, a support assembly includes a first plate having a first side and second side. A ring is disposed on the first side. A stepped surface is formed on the first side radially inward of the ring. A second plate is connected to the second side of the first plate.