The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 10, 2002
Filed:
Sep. 19, 2001
John A. Fitzsimmons, Poughkeepsie, NY (US);
Darryl D. Restaino, Modena, NY (US);
Michael J. Schade, Hopewell Junction, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A method and structure for improving a coating on a substrate comprises a chamber further comprising a rotatable holder, which holds the substrate; a supply of coating material for coating the substrate in the chamber; a window in the wall of the chamber; and a supply of liquid for coating at least a portion of the window on the interior side of the chamber. The chamber is preferably adapted to house the window in multiple configurations. A camera (or other optical detector), which is positioned outside of the chamber, monitors the substrate through the window.