The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 10, 2002
Filed:
Jun. 20, 2000
Applicant:
Inventors:
Yuanning Chen, Orlando, FL (US);
Sundar Srinivasan Chetlur, Singapore, SG;
Sailesh Mansinh Merchant, Orlando, FL (US);
Pradip Kumar Roy, Orlando, FL (US);
Assignee:
Agere Systems Guardian Corp., Orlando, FL (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/1316 ;
U.S. Cl.
CPC ...
H01L 2/1316 ;
Abstract
An oxide for use in integrated circuits is substantially stress-free both in the bulk and at the interface between the substrate and the oxide. The interface is planar and has a low interface trap density (N ). The oxide has a low defect density and may have a thickness of less than 1.5 nm or less.