The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 10, 2002
Filed:
May. 15, 2001
Applicant:
Inventors:
Lynn David Bollinger, Ridgefield, CT (US);
Iskander Tokmouline, New Fairfield, CT (US);
Assignee:
Jetek, Inc., Ridgefield, CT (US);
Primary Examiner:
Int. Cl.
CPC ...
B23K 1/000 ;
U.S. Cl.
CPC ...
B23K 1/000 ;
Abstract
Multiple plasma jet path sensing positions and multiple localized steering magnetic fields for each plasma jet leg in an atmospheric plasma jet control system are described for a precise control over positions of plasma jet legs as well as their directions in a vertex zone, where a hot gas stream is generated for treatment of a semiconductor device. With a plasma jet generator system in accordance with the invention precise control over the plasma jet legs enables one to virtually eliminate plasma jet path instability at the vertex region.