The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 03, 2002
Filed:
Oct. 12, 1999
Yoichi Mori, Kanagawa-ken, JP;
Kiyomi Arakawa, Kanagawa-ken, JP;
Ebara Corporation, Tokyo, JP;
Abstract
A process for removing nitrogen oxides in exhaust gases is provided. The process comprises mixing an exhaust gas generated during the chemical vapor deposition process for producing semiconductors and containing dinitrogen monoxide (N O), nitrogen monoxide (NO) and nitrogen dioxide (NO ) with ammonia (NH ) in an amount 0.5-3 times the sum of the stoichiometric amount corresponding to nitrogen monoxide and the stoichiometric amount corresponding to nitrogen dioxide; and then contacting said mixed gas with a noble metal catalyst at a sufficiently high temperature to decompose dinitrogen monoxide, nitrogen monoxide and nitrogen dioxide. Dinitrogen monoxide (N O), nitrogen monoxide (NO) and nitrogen dioxide (NO ) in exhaust gases can be treated in one step. No N O is produced as a by-product.