The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 26, 2002
Filed:
Dec. 19, 2000
Shawming Ma, Sunnyvale, CA (US);
Guoqiang Xing, Plano, TX (US);
Rahim Kavari, Campbell, CA (US);
Scott R. Summerfelt, Cupertino, CA (US);
Tomoyuki Sakoda, San Jose, CA (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
An embodiment of the instant invention is a method of forming a conductive contact to a top electrode ( and of FIG. ) of a ferroelectric capacitor comprised of a bottom electrode ( of FIG. ) situated under the top electrode and a ferroelectric material ( of FIG. ) situated between the top electrode and the bottom electrode, the method comprising the steps of: forming a layer ( or of FIG. ) over the top electrode; forming an opening ( of FIG. ) in the layer to expose a portion of the top electrode by etching the opening into the layer using a hydrogen-free etchant; and depositing conductive material ( of FIG. ) in the opening to form an electrical connection with the top electrode.