The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 26, 2002
Filed:
Nov. 01, 2000
Robert J. Bailey, Santa Cruz, CA (US);
Lisa H. Michael, Palo Alto, CA (US);
Thomas E. Kane, Santa Cruz, CA (US);
ASML US, Inc., Scotts Valley, CA (US);
Abstract
A chemical vapor deposition (CVD) system is provided for processing a substrate The system includes a heated muffle a chamber having an injector assembly for introducing chemical vapor to process the substrate and a belt for moving the substrate through the muffle and chamber. The belt has an oxidation-resistant coating to reduce formation of deposits thereon. The coating is particularly useful for resisting formation of chromium oxides on belts made from a chromium-containing alloy. In one embodiment, the oxidation-resistant coating comprises a securely-adhered oxide layer that is substantially free of transition metals. Preferably, the oxidation-resistant coating comprises aluminum oxide. More preferably, the coating comprises an aluminum oxide layer securely adhered over a nickel aluminide layer