The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 26, 2002
Filed:
Dec. 20, 2000
James P. Quill, Wakefield, MA (US);
Axcellis Technologies, Inc., Beverly, MA (US);
Abstract
An evacuation system for a chamber ( ) is provided, including a pump ( ) for removing gases and contaminants from the chamber. The pump has an outlet ( ) connected to an exhaust duct ( ). A collector trap ( ) for use in collecting contaminants evacuated from the chamber is positioned between the pump outlet ( ) and the exhaust duct ( ). The collector trap ( ) comprises: (i) a gas/contaminant separator ( ) having an inlet ( ) for introducing gases and contaminants therein, the separator ( ) functioning to physically separate the gases and contaminants; (ii) a contaminant collector ( ) for collecting the separated contaminants, the collector ( ) including an extractor coupling ( ) for allowing extraction of the contaminants from the collector; and (iii) an outlet ( ) for allowing the separated gases to exit the gas/contaminant separator ( ) and into the exhaust duct ( ).