The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 19, 2002

Filed:

Apr. 13, 2000
Applicant:
Inventor:

Paul Dana Wohlfarth, Vernonia, OR (US);

Assignee:

Credence Systems Corporation, Fremont, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01K 1/100 ;
U.S. Cl.
CPC ...
G01K 1/100 ;
Abstract

Variation in temperature of a digital logic circuit that temporarily increases its heat production after a digital input signal changes state is limited using a heater that applies heat to the digital logic circuit at a variable rate. A control circuit monitors all of the circuit's digital input signals and temporarily decreases the rate at which the heater applies heat to the digital logic circuit after each state change in a digital input signal. The amount of temporary reduction in heater output is sized to substantially match the amount of temporary increase in logic circuit heat production so that the temperature of the logic circuit remains largely unaffected. A feedback circuit is also provided to monitor the temperature of the digital logic circuit and to further adjust the heater output so as to help maintain the logic circuit at a desired temperature.


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