Device for measuring the complex refractive index and thin film thickness of a sample

Abstract

An ellipsometer for measuring the complex refractive index of a sample and thin film thickness according to the invention. The ellipsometer includes a linear polarized light source, a reference analyzer, a polarization analyzer and a light direction controller. The linear polarized light source used to generate a measuring beam for detecting the sample. The phase modulator used to control the phase of the measuring beam thereby to generate a sampling beam. The reference analyzer used to generate a reference beam according to part of the sampling beam thereby to adjust the intensity of the sampling beam. The polarization analyzer used to analyze the phase, polarization and intensity of the sampling beam after the sampling beam is reflected by the sample. The light direction controller used to control the angle and direction of the sampling beam with respect to the sample, wherein the sampling beam is reflected by the sample to enter the light direction controller, and thereafter the sampling beam is reflected by the light direction controller and re-reflected by the sample to enter the polarization analyzer along an original optical path, but toward an opposite direction.