The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 19, 2002
Filed:
Jan. 29, 2000
Marc I. Zemel, Bedminster, NJ (US);
Anvik Corporation, Hawthorne, NY (US);
Abstract
A dockable substrate chuck and demountable substrate frame, which can be placed atop the dockable substrate chuck, effectively extend the moving platform of an X-Y stage to access a larger substrate area. The system features a substrate chuck docking fixture. The dockable substrate chuck selectively grips or glides on a grip/glide plate on the stage. A bridge suspends the optics and Z-movable kinematic elements of a substrate chuck docking fixture. The docked dockable substrate chuck is fixed in space, in glide mode on a temporary air bearing. When the stage carriage reaches a new position with respect to the dockable substrate chuck, the substrate chuck docking fixture is turned off, and the puck of the dockable substrate chuck regains its grip on the grip/glide plate. The dockable substrate chuck is newly positioned on the stage, the demountable substrate frame is located with respect to the dockable substrate chuck, and the dockable substrate chuck vacuum grips the substrate for a high resolution scan.