The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 19, 2002

Filed:

Sep. 30, 1999
Applicant:
Inventors:

Michael R. Bruce, Austin, TX (US);

Victoria J. Bruce, Austin, TX (US);

Jeffrey D. Birdsley, Austin, TX (US);

Rosalinda M. Ring, Austin, TX (US);

Rama R. Goruganthu, Austin, TX (US);

Brennan V. Davis, Austin, TX (US);

Assignee:

Advanced Micro Devices, Inc., Sunnyvale, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 3/1302 ; G01R 1/04 ; H01H 3/102 ;
U.S. Cl.
CPC ...
G01R 3/1302 ; G01R 1/04 ; H01H 3/102 ;
Abstract

A method and system providing spatial and timing resolution for photoemission microscopy of an integrated circuit. A microscope having an objective lens forming a focal plane is arranged to view the integrated circuit, and an aperture element having an aperture is optically aligned in the back focal plane of the microscope. The aperture element is positioned for viewing a selected area of the integrated circuit. A position-sensitive avalanche photo-diode is optically aligned with the aperture to detect photoemissions when test signals are applied to the integrated circuit.


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