The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 19, 2002
Filed:
Mar. 17, 2000
Toshikatsu Kaneyama, Tokyo, JP;
JEOL Ltd., Tokyo, JP;
Abstract
There is disclosed an energy filter for use in an electron microscope, the energy filter having an electron passage that can be evacuated more reliably than heretofore. The filter can be designed compactly without increasing the polepiece gaps or the spaces to accommodate coils. The energy filter has an electron-deflecting magnet assembly. This assembly comprises a pair of opposite polepiece bases, a pair of spacers interposed between the polepiece bases, and a yoke mounted to side surfaces of the polepiece bases. Magnetic polepieces and coil grooves of a given width are formed in the opposite surfaces of the polepiece bases. Bulges forming shunts are formed outside the coil grooves in the polepiece bases. O-ring grooves are formed in the spacers on the sides of the polepiece bases around the coil grooves. Electron passage grooves are formed in the opposite surfaces of the spacers to form the electron passage.