The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 12, 2002
Filed:
Dec. 17, 1999
Zhiyi Yu, Gilbert, AZ (US);
Jun Wang, Gilbert, AZ (US);
Ravindranath Droopad, Chandler, AZ (US);
Alexander Demkov, Phoenix, AZ (US);
Jerald Allan Hallmark, Gilbert, AZ (US);
Jamal Ramdani, Gilbert, AZ (US);
Motorola, Inc., Schaumburg, IL (US);
Abstract
A semiconductor structure comprises a silicon substrate ( ), one or more layers of single crystal oxides or nitrides ( ), and an interface ( ) between the silicon substrate and the one or more layers of single crystal oxides or nitrides, the interface manufactured with a crystalline material which matches the lattice constant of silicon. The interface comprises an atomic layer of silicon, nitrogen, and a metal in the form MSiN , where M is a metal. In a second embodiment, the interface comprises an atomic layer of silicon, a metal, and a mixture of nitrogen and oxygen in the form MSi[N O ] , where M is a metal and X is 0≦X<1.