The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 05, 2002

Filed:

Aug. 06, 2001
Applicant:
Inventors:

Yoshiaki Ikuta, Kanagawa, JP;

Shinya Kikugawa, Kanagawa, JP;

Hitoshi Mishiro, Ibaraki, JP;

Hiroshi Arishima, Tokyo, JP;

Kaname Okada, Kanagawa, JP;

Katsuhiro Matsumoto, Kanagawa, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
A47G 1/12 ;
U.S. Cl.
CPC ...
A47G 1/12 ;
Abstract

It is characterized by having a pellicle sheet made of a synthetic quartz glass having an OH group concentration of at most 100 ppm and containing substantially no oxygen deficient defect. It is particularly preferred that the OH group concentration is at most 10 ppm, and the internal transmittance is at least 80%/cm at a wavelength of 157 nm.


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