The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 05, 2002
Filed:
Nov. 20, 2000
Applicant:
Inventors:
Assignee:
Ebara Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F04B 4/106 ; F04B 4/906 ;
U.S. Cl.
CPC ...
F04B 4/106 ; F04B 4/906 ;
Abstract
An apparatus for and a method of evacuating a vacuum chamber (process chamber) or the like of a semiconductor fabrication facility, for example. The evacuating apparatus has a vacuum chamber to be evacuated, a discharge pipe connecting the vacuum chamber to an atmospheric port, a vacuum pump connected to the discharge pipe and operable at a variable rotational speed, and a controller for controlling the rotational speed of the vacuum pump.