The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 29, 2002

Filed:

Mar. 21, 1997
Applicant:
Inventors:

Tomas Jarstad, Sollentuna, SE;

Hans Norström, Solna, SE;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/3552 ; H01L 2/900 ; H01L 2/358 ; H01L 2/334 ;
U.S. Cl.
CPC ...
H01L 2/3552 ; H01L 2/900 ; H01L 2/358 ; H01L 2/334 ;
Abstract

Apparatus and methods for manufacturing low-resistant substrate contacts in integrated circuits are disclosed. The contacts are low resistive conducting plugs and are located outside the areas of active components. The substrate is connected from the top portion in order to obtain a low resistance. Multiple metal plugs electrically interconnect the substrate of the integrated circuit with the top portion of the integrated circuit.


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