The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 22, 2002
Filed:
Mar. 30, 2000
Applicant:
Inventors:
Kazuaki Takai, Kawasaki, JP;
Kouji Tani, Kawasaki, JP;
Assignee:
Fujitsu Limited, Kawasaki, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/972 ;
U.S. Cl.
CPC ...
H01L 2/972 ;
Abstract
A semiconductor device includes a ferroelectric capacitor and a protective film of Al O for blocking penetration of H2 atmosphere into the ferroelectric capacitor, wherein the Al O protective film has a density of about 3.0 g/cm or more when the thickness of said protective film exceeds about 20 nm and a density of about 3.1 g/cm or more when the thickness of the protective film is about 20 nm or less.