The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 22, 2002
Filed:
Jun. 29, 2000
Applicant:
Inventors:
Shamouil Shamouilian, San Jose, CA (US);
Mehran Moalem, Cupertino, CA (US);
Tony S. Kaushal, Cupertino, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D 5/368 ;
U.S. Cl.
CPC ...
B01D 5/368 ;
Abstract
An effluent abatement system that may be used to abate F gas content of effluent exhausted from a process chamber such as effluent from a CVD chamber cleaning process includes a catalytic reactor to reduce the content of F in the effluent The system may further include a prescrubber to add reactive gases to the effluent and/or to treat the effluent prior to treatment in the catalytic reactor Alternatively reactive gases can be added to the effluent by a gas source