The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 22, 2002
Filed:
Jun. 28, 2001
Hitoshi Misaka, Fukushima, JP;
Shin-Etsu Handotai Co, Ltd., Tokyo, JP;
Abstract
Adhesion of particles on the surface of a wafer is prevented even if particles are generated during transport, by transferring the wafers after mirror-polishing, cleaning, and drying into a container body having an opening which is closed and hermetically sealed with a cover after introduction of the wafers. The container body is disposed so that the opening is oriented in a direction other than an upward direction, and with the container body in this attitude dry air is supplied through the opening to replace the air in the container body with dry air. Then the container is oriented with the opening facing a wafer supply position and wafers are transferred into the container while the dry air is maintained in the container, after which the top cover is attached to the container body, with all of these steps being performed under highly clean air having an absolute water content of 2 ppm or less.