The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 15, 2002
Filed:
Feb. 28, 2001
Applicant:
Inventors:
Ji-soo Kim, Yongin, KR;
Wan-jae Park, Suwon, KR;
Chang-woong Chu, Suwon, KR;
Sang-hun Seo, Daejeon, KR;
Assignee:
Samsung Electronics Co., Ltd., Suwon, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/144 ;
U.S. Cl.
CPC ...
H01L 2/144 ;
Abstract
A conducting line of a semiconductor device using an aluminum oxide layer as a hard mask, and a method of forming the conducting line. The conducting line, such as a gate line or a bit line of a semiconductor device, includes a conductive layer formed on a semiconductor substrate, a capping insulation layer formed on the conductive layer, and an aluminum oxide layer formed on the capping insulation layer, with the aluminum oxide layer being used as a hard mask.