The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 15, 2002
Filed:
Nov. 27, 2000
Applicant:
Inventors:
Assignee:
Hyundai Electronic Industries Co., Ltd., Ichon-shi, KR;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/1336 ; H01L 2/9788 ;
U.S. Cl.
CPC ...
H01L 2/1336 ; H01L 2/9788 ;
Abstract
There is disclosed a method of manufacturing a flash memory device. In order to solve the problems that expensive photograph equipments are required and the manufacturing costs are thus increased when defining a floating gate and a control gate in a flash memory cell used in a high-integration flash memory device, the present invention performs an etching process for defining a floating gate with an-isotropic etching process. Therefore, it can minimize the areas of a cell and thus obtain a high-integration device.