The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 15, 2002
Filed:
Apr. 09, 1999
Keiji Watanabe, Kawasaki, JP;
Miwa Kozawa, Kawasaki, JP;
Ei Yano, Kawasaki, JP;
Takahisa Namiki, Kawasaki, JP;
Koji Nozaki, Kawasaki, JP;
Junichi Kon, Kawasaki, JP;
Eiichi Hoshino, Kawasaki, JP;
Masahiro Uraguchi, Kawasaki, JP;
Toshikatsu Minagawa, Kawasaki, JP;
Yuichi Yamamoto, Kawasaki, JP;
Fujitsu Limited, Kawasaki, JP;
Abstract
A resist composition comprising, in a resist, an additive which has a melting point-of 160° C. or above, contains no aromatic ring, has a molecular size of no greater than 50 Å and is soluble in the developing solution for the resist, at 1-50 parts by weight with respect to 100 parts by solid weight of the resist, as well as a pattern forming process employing it. It thereby becomes possible to obtain high-resolution resist patterns.