The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 15, 2002

Filed:

Mar. 20, 2000
Applicant:
Inventors:

Rolf Schumacher, Berlin, DE;

Mathias Wünsche, Zepernick, DE;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 4/108 ;
U.S. Cl.
CPC ...
H01L 4/108 ;
Abstract

In order to achieve reproducible vibration excitation of a quartz crystal even under the technical conditions which prevail when it is used for monitoring electroplating baths, a mounting for the quartz crystal is proposed. The mounting for the quartz crystal has two holding elements detachably connected to one another as a form-fit, and at least two contact elements on the holding elements brought into electrical contact with the contacting surfaces of the quartz crystal The quartz crystal is fitted with the holding elements and/or the contact elements at least one of the contact elements being configured as a resilient body. The at least one resilient contact element has an end face for electrically contacting the quartz crystal the size of which face corresponds roughly to the size of the quartz crystal


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