The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 01, 2002
Filed:
Jun. 30, 2000
Applicant:
Inventors:
Jürgen Frosien, Riemerling, DE;
Reinhold Schmitt, München, DE;
Assignee:
Advantest Corp., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 3/1302 ;
U.S. Cl.
CPC ...
G01R 3/1302 ;
Abstract
A method and a system for testing an electrical component in a non-contact manner at high speed with high reliability. The method includes the steps of positioning a primary particle beam onto the component, supplying an AC-signal to the electrode being positioned in front of the component and varying the frequency of the AC-signal, detecting secondary particles released at the component and penetrating the electrode to form a secondary particle signal, and evaluating the corresponding secondary particle signal.