The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 01, 2002

Filed:

Mar. 31, 2000
Applicant:
Inventors:

Kazuhiko Hidaka, Tsukuba, JP;

Kaoru Matsuki, Tsukuba, JP;

Kiyokazu Okamoto, Tsukuba, JP;

Assignee:

Mitutoyo Corporation, Kanagawa, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 2/900 ;
U.S. Cl.
CPC ...
G01N 2/900 ;
Abstract

A movement control mechanism of contact-type vibrating probe is provided, where the contact-type vibrating probe can be used as a probe for profiling measurement and continuous measurement and configuration of a workpiece can be measured with high accuracy. The movement control mechanism for controlling movement of a support body ( ) which moves a contact-type vibrating probe ( ) having high detection accuracy includes a vibrator for vibrating the stylus in an axial direction, a detector ( ) for detecting a vibration of the stylus by the vibrator, second vibrator for vibrating the stylus in a direction approximately parallel to an end surface of the workpiece, and a controller ( ) for controlling movement of the support body ( ) so that change in state quantity of a detection signal detected by the detector is constant.


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