The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 10, 2002
Filed:
Jul. 28, 1999
Fumio Hosokawa, Tokyo, JP;
Jeol Ltd., Tokyo, JP;
Abstract
There is disclosed a TEM (transmission electron microscope)/SEM (scanning electron microscope) instrument capable of x-ray mapping with automated correction of specimen drift. In x-ray mapping, an SE (secondary electron) image of a scanned region on a specimen is stored as a reference image in memory in the first scan. After a given number of scans are made, an SE image is derived and subject to comparison. The cross-correlation function between each image to be compared and the reference image is calculated to find the direction and amount of the deviation of each image from the reference image. The electron beam deflection system is so controlled as to cancel the deviation, thus correcting the specimen drift. Whenever a given number of scans are made, the correction of the specimen drift is performed.