The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 03, 2002
Filed:
Jul. 20, 2000
Samsung Electronics Co., Ltd., Hwasung, KR;
Abstract
A wafer probing system, and a wafer-probing needle calibrating method using the same are provided. The system comprises a main support, a wafer chuck mounted on the main support, a needle chuck for contacting one of the plurality of needles. The needle chuck is comprised of a conductive signal line, and a shield line for shielding the signal line. Further, the system includes positioning means, for determining the position of the plurality of needles, moving means, for vertically moving the needle chuck, being coupled to the support, and means for horizontally moving the support based on the determined position of the plurality of needles. With the present invention system and method, signals applied to wafer probing needles can be accurately calibrated.