The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 03, 2002
Filed:
Feb. 28, 2000
Applicant:
Inventor:
Szetsen Steven Lee, Taipei, TW;
Assignee:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 7/00 ;
U.S. Cl.
CPC ...
G03F 7/00 ;
Abstract
A method of forming a field emission device for a flat panel display includes operating a projection exposure apparatus. This comprises placing three layers of exposure sensitive material on a device in succession, with steps of exposure and removal of material between deposition of subsequent layers of exposure sensitive material. Furthermore, a field emission device is formed by exposing a third layer of exposure sensitive material, wherein a tip on the field emission device or plurality of tips on the field emission devices can be obtained with differing sharpness characteristics by varying the depth and diameter of holes in a mask used during exposure of exposure sensitive material.