The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 03, 2002
Filed:
May. 28, 1999
Applicant:
Inventors:
Barbara Fröschle, Dornstadt, DE;
Roland Leutenecker, Wiedenzhausen, DE;
Peter Ramm, Pfaffenhofen, DE;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 1/630 ; C23C 1/634 ; C23C 1/656 ;
U.S. Cl.
CPC ...
C23C 1/630 ; C23C 1/634 ; C23C 1/656 ;
Abstract
In a method for producing a titanium monophosphide layer, a carrier is first placed in a reactor. Thereafter, a TiN layer is deposited on the carrier by supplying TiCl ad NH into the reactor. The TiN layer is annealed immediately after deposition of the TiN layer while PH is supplied to the reactor, in order to form the titanium monophosphide layer on the TiN layer.