The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 03, 2002

Filed:

Sep. 19, 2000
Applicant:
Inventors:

Patrick J. Helly, Valley Center, CA (US);

Masud Akhtar, Lawrenceville, NJ (US);

Assignee:

The Boc Group, Inc., Murray Hill, NJ (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D 5/302 ;
U.S. Cl.
CPC ...
B01D 5/302 ;
Abstract

A process for purifying methylsilane is described. Methylsilane containing impurities such as carbon dioxide, chlorosilane and atmospheric gases is fed from a source container unit to an adsorption unit at −40° C. The adsorption unit is connected to a collection unit at −190° C. where the purified methylsilane is transported and can be stored.


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