The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 27, 2002
Filed:
Apr. 02, 2001
Applicant:
Inventors:
Xian J. Ning, Mohegan Lake, NY (US);
Joachim Nuetzel, Fishkill, NY (US);
Assignee:
Infineon Technologies North America Corp., San Jose, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/1467 ;
U.S. Cl.
CPC ...
H01L 2/1467 ;
Abstract
A method of patterning conductive lines ( ) of a memory array integrated circuit ( ) using a hard mask ( ) and reactive ion etching (RIE). Using a hard mask ( ) prevents oxidation of underlying conductive lines ( ).