The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 27, 2002
Filed:
Aug. 15, 2000
Applicant:
Inventors:
Youichi Ohsawa, Nakakubiki-gun, JP;
Jun Watanabe, Nakakubiki-gun, JP;
Wataru Kusaki, Nakakubiki-gun, JP;
Satoshi Watanabe, Nakakubiki-gun, JP;
Takeshi Nagata, Nakakubiki-gun, JP;
Shigehiro Nagura, Nakakubiki-gun, JP;
Assignee:
Shin-Etsu Chemical Co., LTD, , JP;
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 ;
U.S. Cl.
CPC ...
G03F 7/004 ;
Ohsawa, Youichi. (2002). Onium salts, photoacid generators for resist compositions, resist compositions, and patterning process (U.S. Patent No. 6440634). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6440634
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile