The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 20, 2002
Filed:
Jun. 08, 2000
Applicant:
Inventor:
Tsong-Minn Hsieh, Miao-Li, TW;
Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/18242 ;
U.S. Cl.
CPC ...
H01L 2/18242 ;
Abstract
A method for forming self-aligned split gates in a flesh memory is disclosed. The method includes two-step lithographic definition of a split gate and nitride spacer formation of the gate. The two-step lithography procedure is designed to assist the nitride spacer formation. The nitride spacer formation is used to facilitate gate etching in a self-aligned manner so that the channel length of the split gate is under proper control and the effect of gate misalignment can be totally avoided. The product quality of the flesh memory therefore gets improved.
Hsieh, Tsong-Minn. (2002). Method for manufacturing a flash memory with split gate cells (U.S. Patent No. 6436764). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6436764
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile