The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 20, 2002
Filed:
Dec. 15, 1998
Applicant:
Inventors:
Kazuaki Omi, Yokohama, JP;
Takao Yonehara, Atsugi, JP;
Kiyofumi Sakaguchi, Yokohama, JP;
Kazutaka Yanagita, Yokohama, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B32B 3/500 ; H01L 2/14763 ;
U.S. Cl.
CPC ...
B32B 3/500 ; H01L 2/14763 ;
Abstract
An apparatus for separating a substrate having a porous layer at the porous layer is provided. A bonded substrate stack ( ) having a porous layer ( ) is supported by substrate holding portions ( ) while being rotated. High-speed, high-pressure water (jet) is ejected from a nozzle ( ) and injected against the bonded substrate stack ( ), thereby physically separating the bonded substrate stack ( ) into two substrates. The jet pressure is appropriately changed in accordance with progress of separation processing.