The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 13, 2002
Filed:
Jul. 31, 2000
Applicant:
Inventors:
Yutaka Endo, Fukaya, JP;
Nobuyoshi Tanno, Zao-machi, JP;
Assignee:
Nikon Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/100 ; B65G 4/907 ; B65D 8/500 ;
U.S. Cl.
CPC ...
H01L 2/100 ; B65G 4/907 ; B65D 8/500 ;
Abstract
A substrate storage cassette positioning device and method for positioning a substrate storage cassette in a predetermined location on an installation platform, comprising a guide section for guiding the substrate storage cassette into a predetermined location during the positioning of the substrate storage cassette.
Published as: