The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 06, 2002
Filed:
Feb. 10, 2000
Charles Montrose, Clintondale, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
An apparatus for monitoring and recording multiple gate dielectric leakage currents during a reliability characterization test. The large number of devices tested allows for longer testing at lower voltages thereby minimizing the need to rely on mathematical models. Solid-state multiplexers (MUX) at multiple levels of test apparatus assembly eliminate excess wiring and allow for constant scan monitoring of the devices under test (DUT) without concern for wearout of electromechanical switches. Data resolution is enhanced with fewer data readings per fixed time period during quiescent periods and multiple readings when the leakage current is changing more rapidly. Thus the resolution of the data is maximized during the critical phase of dielectric breakdown allowing for more precise characterizations of gate dielectrics without the need to increase data storage.