The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 06, 2002
Filed:
Sep. 29, 2000
David R. Greenberg, White Plains, NY (US);
Kathryn T. Schonenberg, New Fairfield, CT (US);
Seshadri Subbanna, Brewster, NY (US);
Keith M. Walter, Walkill, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A microwave PIN diode having an increased intrinsic region volume for storing a charge. A semiconductor substrate has an N+ subcollector/cathode layer which encloses a region of the substrate. An N-skin formed over the interior of enclosed region. An Si layer is formed over the subcollector/cathode and N-skin to a thickness which defines the thickness for the intrinsic region of the diode. Implants are formed in the Si layer to permit contact with the subcollector/cathode layer. An anode is formed on the top of the Si layer. The total volume of the intrinsic region is increased by the N-skin which is positioned below the surface of the subcollector/cathode. The PIN diode may be formed as a lateral PIN diode thereby increasing the intrinsic region volume even further.