The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 06, 2002

Filed:

Aug. 30, 1999
Applicant:
Inventors:

Siang Ping Kwok, Dallas, TX (US);

William F. Richardson, Richardson, TX (US);

Assignee:

Micron Technology, Inc., Boise, ID (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/120 ;
U.S. Cl.
CPC ...
H01L 2/120 ;
Abstract

In one aspect, the invention encompasses a method of forming a capacitor. A mass is formed over an electrical node. An opening is formed within the mass. The opening has a lower portion proximate the node and an upper portion above the lower portion. The lower portion is wider than the upper portion. A first conductive layer is formed within the opening and along a periphery of the opening. After the first conductive layer is formed, a portion of the mass is removed from beside the upper portion of the opening while another portion of the mass is left beside the lower portion of the opening. A dielectric material is formed over the first conductive layer, and a second conductive layer is formed over the dielectric material. The second conductive layer is separated from the first conductive layer by the dielectric material. In another aspect, the invention encompasses a capacitor construction.


Find Patent Forward Citations

Loading…